Photonometers for coating and sputtering machines

The concept of photonometers (alternative name of optical monitor of a vacuum deposition process) for coating and sputtering machines is based on photonometers produced by companies like SATIS or poise pads in bulk HV Dresden.Photometers were developed in the TOPTEC centre and its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for more than 10 operation igloo white years.The article describes current status of the technology and ideas which will be incorporated in next development steps.Hardware and software used on coating machines B63D, VNA600 and sputtering machine UPM810 is presented.